X-射线光电子能谱仪

仪器型号：Sigma Probe   英国Thermo VG公司  2002年购置

主要性能：双阳极 Mg/Al靶

          单色器 最小分析区域15微米  能量分辨率 0.47eV

          配备中和枪、氩离子枪、五轴样品台

主要功能:

1.   全扫谱图(Survey spectrum):

2.   窄扫定量:
(Quantitative analysis with narrowscan)        

3.化学状态分析：(Chemical state analysis)

4.深度剖析 (Depth profile)

X-ray photoelectron spectrum

Type:  Sigma Probe,Thermo VG, 2002

Specifications: Twin Anode (Mg, Al),  Mono-chronometer (minimum spotsize 15um),

         Energyresolve 0.47eV

         Flood gun,ion gun, 5-axis sample stage

Application: Analyzing chemical states and relativecontents of elements on sample surface